主要规格及技术指标

Mounted on DN 63 CF flange Fittet to customers flag style sample holder which can be inserted by means of a transfer system Suitable for the linear feedthrough of MA-113 - 1x Heating unit for up to 1000°C (filament radiation heating) Vertically mounted Motion: - Roation around the substrate axis (sample in plane; +/- 175°) Integrated heating unit - Temperature range up to 1000°C - Filament heating - Incl. thermocouple type K (others on request) Incl. contacts for direct current heating of a wafer on a CreaTec-SH with side contacts (<3.6A; <100V) Pressure range from UHV up to 1 x 10-6mbar

主要功能及特色

运动：可绕轴旋转±175° ？ 集成加热模块 - 温度可达1000度 - 灯丝加热 - K型热偶测温 ？ 集成直流加热功能，电流<3.6A，电压<100V。 ？ 真空适用范围，从UHV至1e-6mbar ？ 经过液氦检漏 ？ 另提供一个测温二极管B1B0 (在2-100K范围内测温精度±0.5K) ？ 包含一个可测温样品托，最高温度140℃ 注：测温二极管B1B0是美国产品，需要提供最终用户声明

主要附件及配置

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