主要规格及技术指标

Mounted on DN 63 CF flange
Fittet to customers flag style sample holder which can be inserted by means of
a transfer system
Suitable for the linear feedthrough of MA-113
- 1x Heating unit for up to 1000°C (filament radiation heating)
Vertically mounted
Motion:
- Roation around the substrate axis (sample in plane; +/- 175°)
Integrated heating unit
- Temperature range up to 1000°C
- Filament heating
- Incl. thermocouple type K (others on request)
Incl. contacts for direct current heating of a wafer on a CreaTec-SH with side
contacts (<3.6A; <100V)
Pressure range from UHV up to 1 x 10-6mbar

主要功能及特色

运动：可绕轴旋转±175°
？ 集成加热模块
- 温度可达1000度
- 灯丝加热
- K型热偶测温
？ 集成直流加热功能，电流<3.6A，电压<100V。
？ 真空适用范围，从UHV至1e-6mbar
？ 经过液氦检漏
？ 另提供一个测温二极管B1B0 (在2-100K范围内测温精度±0.5K)
？ 包含一个可测温样品托，最高温度140℃
注：测温二极管B1B0是美国产品，需要提供最终用户声明

主要附件及配置

无